Together with our long-term Korean partner, we can provide different Upgrades and spare parts for the Concept 1.

Major upgrades includes adding a Remote Plasma Clean (RPS) which provides a faster and more effective clean, by reducing cleaning time, reducing particle count inside the chamber and providing a higher wafer throughput. The time between two cleaning cycles can be significantly reduced as well.

With our Software Upgrade the tools can be upgrade with a user-friendly Windows based GUI.

Please ask us about our other solutions like One Arm Robot or Spindle Fork Upgrade.

We can provide various spare parts as well, including obsolete boards.