CE-MAT GmbH
Booth number: 1444-02
ce-mat.com/
About us
Founded in 2004, CE-MAT specializes in providing innovative, cost-effective solutions for the semiconductor industry. With customers across Germany, Europe, and international markets, we have built a reputation for reliability, quality, and responsive service.
Working closely with our established partners in Asia and Europe, we supply high-quality second-source components, equipment, and technical service solutions. Our global network enables us to offer dependable products, competitive lead times, and flexible sourcing options tailored to our customers' needs.
Address
Bachweg 2
63589 Linsengericht
Germany
E-mail: info@ce-mat.com
Phone: +49 6051 9773920
Internet: ce-mat.com/
Contact person:
Jan Hellmann
Sales Manager
E-mail: jan.hellmann@ce-mat.com
Phone: +49 171 9990542
Axel Junge
Sales Manager
E-mail: axel.junge@ce-mat.com
Phone: +49 151 27172616
Products & Services
Silicon Boat for vertical furnace
CE-MAT supplies high-purity silicon boats made from CZ monocrystalline silicon for wafer diameters of 150 mm, 200 mm, and 300 mm. We are qualified with all three major furnace makers and can supply Long Finger and Short Finger boats.
Spare Parts for Dry Etch, CVD and PVD Tools
CE-MAT can supply spare parts for all major OEMS for Dry Etch, CVD and PVD tools.
Some examples are Silicon Insert Ring, Quartz Shadow Ring, Silicon Electrodes, Gaskets, Showerheads, AlN Heaters and Electrostatic Chucks.
We can quote all parts with a provided OEM part number.
Upgrade Solutions and Spare Parts for Novellus Concept 1 and 2.
Together with our long-term Korean partner, we can provide different upgrades and spare parts for the Concept 1 and 2.
Quartz Glass Products
Having a strong background on quartz glass, CE-MAT can provide raw materials and quartz parts for furnaces and epitaxy.
Silicon Boat for vertical furnace
CE-MAT supplies high-purity silicon boats made from CZ monocrystalline silicon for wafer diameters of 150 mm, 200 mm, and 300 mm.
Unlike quartz or SiC boats, the identical thermal expansion between the Silicon Boat and the wafermaterial minimizes friction, reducing backside scratches, slip lines, and front side defects. This has been proven to increase chip yield, confirmed by several customer qualifications.
The boats consisting of a top and bottom plates and the rods are easily assembled directly at the customer site. Capacity can be increased by 15–20% through additional slots, often eliminating the need for new furnaces.
All boats are cleaned and packed in a class 100 cleanroom. While no further cleaning is needed, a pre-conditioning process (included) must be performed before use in production.
CE-MAT offers fast delivery times of 12–14 weeks, compared to >52 weeks for SiC boats – giving customers both technical and logistical advantages.
CE-MAT also supplies special boats with removable wafer holders. These boats consist of a base body with precisely fitting seats for the individual wafer holders. It is possible to replace individual holders in case of damage or change of the design.
Spare Parts for Dry Etch, CVD and PVD Tools
CE-MAT can supply spare parts for all major OEMS for Dry Etch, CVD and PVD tools. We are working with our long-term manufacturers from Germany, Japan, Taiwan and Korea and can quote the parts with a provided OEM PN.
CE-MAT can provide different parts made from Quartz, Silicon and Ceramic for most chamber types such as LAM (Rainbow, Exelan, Flex, Alliance, Kiyo), AMAT (Super-E, MXP, MXP+), TEL (Jiox, SCCM, Unity, Vigus, Telius) and others.
We are already qualified with our parts in all mayor chip makers in Germany.
Upgrade Solutions and Spare Parts for Novellus Concept 1 or 2
Together with our long-term Korean partner, we can provide different Upgrades and spare parts for the Concept 1.
Major upgrades includes adding a Remote Plasma Clean (RPS) which provides a faster and more effective clean, by reducing cleaning time, reducing particle count inside the chamber and providing a higher wafer throughput. The time between two cleaning cycles can be significantly reduced as well.
With our Software Upgrade the tools can be upgrade with a user-friendly Windows based GUI.
Please ask us about our other solutions like One Arm Robot or Spindle Fork Upgrade.
We can provide various spare parts as well, including obsolete boards.
