CE-MAT can supply spare parts for all major OEMS for Dry Etch, CVD and PVD tools. We are working with our long-term manufacturers from Germany, Japan, Taiwan and Korea and can quote the parts with a provided OEM PN.

CE-MAT can provide different parts made from Quartz, Silicon and Ceramic for most chamber types such as LAM (Rainbow, Exelan, Flex, Alliance, Kiyo), AMAT (Super-E, MXP, MXP+), TEL (Jiox, SCCM, Unity, Vigus, Telius) and others.

We are already qualified with our parts in all mayor chip makers in Germany.