CE-MAT supplies high-purity silicon boats made from CZ monocrystalline silicon for wafer diameters of 150 mm, 200 mm, and 300 mm.

Unlike quartz or SiC boats, the identical thermal expansion between the Silicon Boat and the wafermaterial minimizes friction, reducing backside scratches, slip lines, and front side defects. This has been proven to increase chip yield, confirmed by several customer qualifications.

The boats consisting of a top and bottom plates and the rods are easily assembled directly at the customer site. Capacity can be increased by 15–20% through additional slots, often eliminating the need for new furnaces.

All boats are cleaned and packed in a class 100 cleanroom. While no further cleaning is needed, a pre-conditioning process (included) must be performed before use in production.

CE-MAT offers fast delivery times of 12–14 weeks, compared to >52 weeks for SiC boats – giving customers both technical and logistical advantages.

CE-MAT also supplies special boats with removable wafer holders. These boats consist of a base body with precisely fitting seats for the individual wafer holders. It is possible to replace individual holders in case of damage or change of the design.