SEMICON West 2026Products & Services Selective reference layer pinning in TMR and GMR sensors: microVEGA® XMR
Selective reference layer pinning in TMR and GMR sensors: microVEGA® XMR
Exhibitor
3D-Micromac AG
Selective laser annealing enables targeted activation of functional layers with minimal thermal impact on surrounding structures – a key technology in advanced semiconductor production. Our systems offer outstanding process uniformity, repeatability, and efficiency at an industrial scale.
3D-Micromac's microVEGA xMR precisely programms TMR & GMR sensors by selective pinning of the magnetic orientation of the reference layer. The award-winning microVEGA xMR system is used worldwide in the high-volume production of monolithically integrated sensor chips.

The award-winning microVEGA xMR enables magnet sensor laser pinning with high-throughput.