The MT3000  is developed by MueTec and presents the new generation from our existing and market established MT3000 metrology System. High throughput with increased measurement precision in overlay and CD is the application field of the MT3000. With the new high speed stage and the precise piezo z-drive we achieve a higher performance and throughput as with current measurement systems. The MT3000 is designed for production environment with requirement on high flexibility combined with fully automated operation.