MueTec Automatisierte Mikroskopie und Meßtechnik GmbH
Booth number: 1245-11
muetec.com
About us
MueTec is an established Metrology & Inspection tool provider into the Semiconductor Industry. Our proven optical technologies are the foundation for fast, reliable and accurate measurements matching todays customer demands. From high throughput to detailed inspection we offer a vast amount of capabilities which allows our customer to improve their yield, to better understand their production process and address the right action for better production output. Being close to our customer isn't just a statement for us, it's our daily life and we are proud to call the main player in the market as our customers. Our dynamic and customer orientated workforce is tailored to work closely with our customers and manage any specifics needs they might have. With over 400 tools installed worldwide we are happy to serve our worldwide customers with our local organizations.
Address
Hans-Bunte-Straße 5
80992 Moosach
Germany
E-mail: joerg.collrep@muetec.com
Phone: +49 170 7861796
Internet: muetec.com
Contact person:
Bill Price
US Sales Representative
E-mail: william.price@muetec.com
Joerg Collrep
Head of Global Sales
E-mail: joerg.collrep@muetec.com
Products & Services
Open & closed frame Metrology and Inspection Tools, manual, semi-automatic, fully automatic for wafers and masks
Metrology: MT2010, MT270UV, MT3000 VIS/UV/IR, IRIS2100, DaVinci 200 or 300VIS/UV/IR, DaVinci 300i²OVL, DaVinci 270UV
Inspection: SPECTOR A/M/5500, IRIS2100, MT3000 VIS/UV, MT5500, ARGOS, Rembrandt, SENTINEL
Open Frame Tools 3" - 14"
Closed Frame Tools 150 -300 mm, Loading: OC, SMIF, FOUP
various sensitivity depending on tool and measurement technology & application
Global Sales & Service Organization
DaVinci i²OVL
The 5. tool-generation of the DaVinci metrology system is developed for high speed single purpose overlay measurement targeting down to the 28nm node technology field. With the new stage hardware and optimized algorithm the G5 system is state of the art for new nanometer structured wafer metrology through low positioning error and high throughput.
MT3000
The MT3000 is developed by MueTec and presents the new generation from our existing and market established MT3000 metrology System. High throughput with increased measurement precision in overlay and CD is the application field of the MT3000. With the new high speed stage and the precise piezo z-drive we achieve a higher performance and throughput as with current measurement systems. The MT3000 is designed for production environment with requirement on high flexibility combined with fully automated operation.
ARGOS 300
Automatic and fully enclosed up to 12” High Throughput Wafer Defect Inspection System. The simultaneous frontside and backside inspection makes the tool suitable for a high volume production environment. The Tool is optimized for high throughput, small footprint and simplified operator control. The recipe less operation enables the user to scan and detect defects on a variety of different process layers automatically without the need of creating layer specific recipes.
ARGOS 200
Automatic and fully enclosed 6” and 8” High Throughput Wafer Defect Inspection System. The simultaneous frontside and backside inspection makes the tool suitable for a high volume production environment. The Tool is optimized for high throughput, small footprint and simplified operator control. The recipe less operation enables the user to scan and detect defects on a variety of different process layers automatically without the need of creating layer specific recipes.
SPECTOR Series
Automatic and fully enclosed Mask Defect Inspection System with robot handling from masks by up to 2 pod or cassette stations. Automatic inspection based on die-to-die approach to detect statistical failures and automatically decide if the photomask is good, requires cleaning or needs to be replaced. The usage from masks size up to 14” is feasible.
DaVinci 300IR
The DaVinci 300IR presents MueTec leading product for infrared metrology and inspection focused on MEMS-Technology. Combined with visible light option the systems brings benefits for in-line process control as all in one system. Our 20 year experience in IR systems is focused in the DaVinci 300IR and enable the customer to use for a variety of different applications.
