High speed loading and unloading of wafers in and out of single/double side polishing or lapping tools - thanks to an innovative, vision based wafer detection system. it ensures maximum efficiency and process reliability. The solution integrates seamlessly into your existing production line and supports wafer sizes from 150 to 300mm, regardless of the machine manufacturer.

Flexibility allows customizations and extensions, e.g. dry-in - dry-out with a post-cleaning tool, multiple Load Ports etc.

Apollu meets ISO-7 standards for cleanroom operations and offers a quick setup time to flexibly respond to changing production requirements. The result: stability, quality, and a significant relief for your employees.