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SEMICON West 2026German Exhibitors cts GmbH competence for technical solutions

cts GmbH competence for technical solutions

Booth number: 1245-10
www.group-cts.com/en

About us

The cts Group is an independent full-service provider addressing the three key challenges of modern industry: stable process control, automated production and digital data infrastructure. In industries such as pharmaceuticals, chemicals, electronics, energy, and food, cts supports industrial companies with practical planning, technical implementation, and reliable project management.

In the Manufacturing Automation division, cts supports manufacturing companies in automating their production and logistics processes – with customizable systems and machines for material flow, handling, and specialized industrial processes.

The Industrial Informatics division lays the foundation for data-driven decision-making in industrial environments. Seamless communication between IT and OT ensures that industrial data is complete, understandable, and usable – across locations, in real time, and in accordance with the highest security standards.

The Process Automation division offers comprehensive, system-independent automation and support for process engineering production processes – from electrical design, control panel construction, and installation to control systems, commissioning, calibration, maintenance, and continuous optimization.

Address

cts GmbH competence for technical solutions
Fuhrmannstraße 10
84508 Burgkirchen a.d. Alz
Germany

E-mail: info@group-cts.com
Phone:  +49 8679 91689-0
Internet: www.group-cts.com/en
cts Americas Inc.
405 Lexington Ave Ste 2601
10174 NY New York
United States

E-mail: sales@group-cts.com
Phone:  +49 8679 91689-0
Internet: www.group-cts.com/en

Contact person:

Alfred Pammer
VP Sales, Marketing & Product Management
E-mail: alfred.pammer@group-cts.com
Phone: +49 8679 91689-110

Products & Services

Semiconductor Manufacturing & Processing
Cleanroom & Process Environment Technology
Factory Automation & Robotics
Advanced Packaging & Assembly
Supply Chain Management & Logistics

Our systems for Smart Semiconductor Fabrication offer high-precision automation that optimizes your wafer production and ensures your competitive edge. From polishing processes to packaging, we rethink semiconductor manufacturing.

Apollu: Automated handling for polishing and lapping processes

With a camera-based positioning system that automatically detects and handles wafers with high precision, and a fast cycle time, the system ensures maximum efficiency and process reliability. The solution integrates seamlessly into your existing production line and supports wafer sizes from 150 to 300 mm, regardless of the machine manufacturer.

Apollu meets ISO-7 standards for cleanroom operations and offers a quick setup time to flexibly respond to changing production requirements. The result: stability, quality, and a significant relief for your employees.

ABT: Fully automated packaging system for FOSB/FOUP/HWS/Wafer Canister

Our modular ABT system automates the entire packing process - from identification and labelling up to leak testing, ensuring error-free and efficient handling. The ABT system uses Code identification, ensuring that each FOSB/FOUP/HWS/Wafer Canister is correctly assigned to the corresponding wafers. Automated checks, such as cross-slot checks and 100% leak tests, minimize the risk of transport damage. An integrated labeling system and Bag/Indicator Applicator ensures that packing meets the highest standards and all information is properly documented.

Thanks to its SECS/GEM compatibility, the ABT system integrates seamlessly into existing production lines without requiring extensive adjustments. It is ideal for manufacturers who prioritize speed, safety, and cleanroom standards.

MBT: Semi-automated packaging system for FOSB/FOUP/HWS/Wafer Canister

Our MBT system automates the packing and sealing process, ensuring reliable, repeatable packaging of FOSB/FOUP/HWS/Wafer Canister. Smooth interaction with the Operator and Host system ensures a seamless chain of automated and manual process steps.

Thanks to its SECS/GEM compatibility, the MBT system integrates seamlessly into existing production lines without requiring extensive adjustments. It is ideal for manufacturers who prioritize speed, safety, and cleanroom standards.

Apollu - Automated Loader and Unloader for Polishing and Lapping tools

High speed loading and unloading of wafers in and out of single/double side polishing or lapping tools - thanks to an innovative, vision based wafer detection system. it ensures maximum efficiency and process reliability. The solution integrates seamlessly into your existing production line and supports wafer sizes from 150 to 300mm, regardless of the machine manufacturer.

Flexibility allows customizations and extensions, e.g. dry-in - dry-out with a post-cleaning tool, multiple Load Ports etc.

Apollu meets ISO-7 standards for cleanroom operations and offers a quick setup time to flexibly respond to changing production requirements. The result: stability, quality, and a significant relief for your employees.

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Dry-In Dry-Out

Dry-In Wet-Out, Transport with AMR/AGV

ABT - Modular, Fully Automated Packing Tool for FOSB/FOUP/HWS/Wafer Canister

ABT is a compact, modular fully automated packing tool for FOSB/FOUP/HWS/Wafer Canister. The modular structure allows different process steps based on customer needs - from standard packing, labelling, application of desiccant bag up to double bag packing, cross-slot checks, Add-On-Parts check, 100% leakage test, HIC-Indicators, multiple desiccant bags etc. 4 Bag magazines in standard ensures high autonomy even with a high mix of bags. The modularity and flexibility of the tool allows us customization to meet specific requirements in footprint as well as functionality.

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Top-View fully equipped tool

Folding and glueing

ISO6 cleanroom compatible

High precision and reliability

MBT - Semi-Automated Packing tool for FOSB/FOUP/HWS/Wafer Canister

The MBT system is designed for production lines that require flexibility to handle changing demands and smaller batches. It combines Operator actions with automated core processes, which is particularly useful for small-to-medium size batches, test/qualification batches, prototypes, and custom orders of FOSB/FOUP/HWS/Wafer Canister.

Thanks to its compact design and ease of use, the MBT system is ideal for companies looking for a reliable and repeatable packaging process which increase efficiency without large investment costs. Even for smaller quantities, it ensures the same high standards as mass production, including the possibility for flexible container adjustment and an automated leak testing in a separate leakage test tool.

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4 Bag Magazines ensure high autonomy

Leakage test tool - can be shared between multiple MBT tools

MBT - Semi Automated packing tool for FOSB/FOUP/HWS/Wafer Canister

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