Milara HyperMation Cluster Tools
Exhibitor
Milara GmbH
During time-controlled fix-process sequences, idle time pockets occur, often dictated by the slowest process step, impacting overall tool throughput. Solutions include buffer stations for wafer storage and multi gripper systems for efficient robot travel. Original Equipment Manufacturers (OEMs) seek shorter cycle times while maintaining precision standards. Milara's HyperMation features self-learning algorithms used in project phases via process simulation with digital twins of semiconductor equipment, optimizing layout, cycle times, and module compositions. The aim is to eliminate idle times and maximize module utilization, tailoring algorithms to each machine's unique layout and processes.

Milara HyperMation Cluster Tool