SEMICON West 2025Products & Services MIRA Pro - semi-compliant, all-in-one metrology system

MIRA Pro - semi-compliant, all-in-one metrology system

Exhibitor
Precitec 3D Metrology

MIRA Pro combines Precitec’s award-winning Flying Spot Scanner 310 with an all-in-one platform for precise measurement of TTV, bow, and warp.

Ideal for:
• Semiconductor labs, R&D, and universities
• Off-line inspection and quality control
• Versatile use across wafer types and materials

Fully equipped with hardware and software – ready for immediate deployment in advanced metrology tasks.

Semi-compliant, all-in-one metrology system from Precitec 3D Metrology

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