SEMICON West 2025Products & Services High-Speed OCT Metrology for Semiconductor Quality Control – Precitec Flying Spot Scanner 310
High-Speed OCT Metrology for Semiconductor Quality Control – Precitec Flying Spot Scanner 310
Exhibitor
Precitec 3D Metrology
Flying Spot Scanner 310 + CHRocodile 2 IT
Winner of the SPIE Prism Award 2023
High-speed OCT system for precise measurement of distance, thickness, and topography.
Rotary scanning replaces linear motion for unmatched speed and accuracy.
Key Features:
• Simultaneous TTV, bow, and warp data in one scan
• No moving axes – robust, fast, and precise
• Ideal for in-line semiconductor quality control
Engineered for demanding metrology tasks where precision is critical.
Experience award-winning performance – Flying Spot Scanner 310.
Inline Quality Control with Flying Spot Scanner 310
