SEMICON West 2025Products & Services VPO-300 vacuum oven for 300mm wafer size with an universal process hood, e.g. for use of pure Hydrogen
VPO-300 vacuum oven for 300mm wafer size with an universal process hood, e.g. for use of pure Hydrogen
Exhibitor
UniTemp GmbH
This is our new safety cabinet combinable with all our products. It is suited for e.g. vacuum process systems with process gas line for pure Hydrogen. The hood is equipped with a service cart which can be easily rolled out. A gas box and a Hydrogen sensor can be mounted inside the box.
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