Fabmatics’ retrofittable Purge System for FOUP and SMIF pods continuously purges wafer carriers with inert gas during interim storage – reliably protecting wafers between process steps from contamination, oxidation, and humidity-induced chemical reactions.

More than 18,000 Fabmatics purge units are already in operation worldwide.

Key Benefits

• Reduces wafer defects and yield loss
  by preventing airborne molecular contamination (AMC) and oxidation during storage

• Extends production flexibility
  by allowing longer queue times between process steps without contamination risk

• Improves overall yield
  through continuous wafer protection in non-active storage locations

• Lowers operational costs
  with durable, low-maintenance components designed for long-term use

• Protects your existing infrastructure investment
  by retrofitting seamlessly into current FOUP/SMIF pod storage systems like Zero Footprint Storage

• Maximizes cleanroom efficiency
  with a compact design that requires no additional floor space

• Ensures full process visibility and control
  via intelligent web-based monitoring and optional HSMS integration