In semiconductor manufacturing, automation begins with reliable digital identification. Even small steps - like tagging carriers or enabling tools to communicate - can significantly increase transparency, reduce errors, and lay the foundation for smarter logistics and scalable process automation. Many fabs still rely on manual or paper-based tracking, making it harder to evolve.

That’s where Fabmatics comes in: With over 20 years of industry experience, we help you take the first step—fitting RFID solutions to your fab’s infrastructure, goals, and pace.

Whether you're retrofitting an existing fab or building new – our RFID systems are scalable, SEMI-compliant, and made to integrate.

• Retrofit-ready

• LF & HF RFID hardware for cleanrooms

• Tailored for FOUPs, SMIF pods, HA200 boxes, Open Cassettes, Reticle Carriers

• Full integration into MES and fab infrastructure

Test wafers are indispensable for semiconductor manufacturing, crucial for equipment qualification and process monitoring. They constitute up to 50% of a fab’s wafer inventory. Managing test wafer lots manually is time-consuming and prone to errors.

The Test Wafer Center (TWC) fully automates kitting and de-kitting of test wafer lots as well as their storage. Its compact and highly flexible layout allows up to 93 storage bins and up to 14 material handling locations making it the perfect solution for complex equipment qualifications scenarios. It gives you complete (remote) control for determining timing and content of each test wafer lot & enables just-in-time delivery to your process equipment.

Featuring SECS host communication, camera-based robot routing, optional wafer alignment & identification, and various carrier identification options, the TWC ensures safe, accurate, & fully traceable material control.

Connecting to any Automated Material Handling System (conveyor or vehicle based) as well as allowing manual carrier input or output, the integration with your fab is seamless & quick.

Our field-proven fleet of mobile robots - our HERO's -  are your perfect match for the handling and transport of wafers, reticles and carriers in the semiconductor industry, as well as for similar substrates in micro and nanoelectronics. They make manual intervention superfluous, helping you to optimize the material flow in your fab.

Navigating their way either autonomously, track- or rail-bound through semiconductor fab's wordwide, they truly are heroes in the cleanroom and make sure that the right material arrives at the right time.

Explore how our automation solutions fit into your manufacturing environment and elevate your fab’s performance, setting new standards for productivity and competitiveness.

HERO Family:

• HERO Fab: Automated guided vehicle (AGV) for quick transport and automatic handling of 200mm wafer cassettes or 300mm FOUPs

• HERO Scout: Autonomous mobile robot (AMR) for the automated handling and transportation of reticle pods

• HERO Rail: Rail-guided vehicle (RGV) for the transport and automated handling of wafer cassettes

Fabmatics’ retrofittable Purge System for FOUP and SMIF pods continuously purges wafer carriers with inert gas during interim storage – reliably protecting wafers between process steps from contamination, oxidation, and humidity-induced chemical reactions.

More than 18,000 Fabmatics purge units are already in operation worldwide.

Key Benefits

• Reduces wafer defects and yield loss
  by preventing airborne molecular contamination (AMC) and oxidation during storage

• Extends production flexibility
  by allowing longer queue times between process steps without contamination risk

• Improves overall yield
  through continuous wafer protection in non-active storage locations

• Lowers operational costs
  with durable, low-maintenance components designed for long-term use

• Protects your existing infrastructure investment
  by retrofitting seamlessly into current FOUP/SMIF pod storage systems like Zero Footprint Storage

• Maximizes cleanroom efficiency
  with a compact design that requires no additional floor space

• Ensures full process visibility and control
  via intelligent web-based monitoring and optional HSMS integration

Material flow simulation is a powerful tool for analyzing and assessing existing system conditions or for enabling well-founded decisions in automation projects. Using material flow simulation, all relevant logistical processes of a semiconductor fab can be integrated into a single comprehensive and dynamic digital model.

The in-depth experimental analysis of this model allows for detailed insights and holistic conclusions about the existing underlying real-world system or can even be used for envisioning the potential dynamics of a non-existing system. This enables our developers and engineers to work with you to minimize risks in the project, create a better understanding of the system and support you effectively in the decision-making process.