Our field-proven fleet of mobile robots - our HERO's -  are your perfect match for the handling and transport of wafers, reticles and carriers in the semiconductor industry, as well as for similar substrates in micro and nanoelectronics. They make manual intervention superfluous, helping you to optimize the material flow in your fab.

Navigating their way either autonomously, track- or rail-bound through semiconductor fab's wordwide, they truly are heroes in the cleanroom and make sure that the right material arrives at the right time.

Explore how our automation solutions fit into your manufacturing environment and elevate your fab’s performance, setting new standards for productivity and competitiveness.

HERO Family:

• HERO Fab: Automated guided vehicle (AGV) for quick transport and automatic handling of 200mm wafer cassettes or 300mm FOUPs

• HERO Scout: Autonomous mobile robot (AMR) for the automated handling and transportation of reticle pods

• HERO Rail: Rail-guided vehicle (RGV) for the transport and automated handling of wafer cassettes