Test Wafer Center - The all-in-one Test Wafer Managment Solution
Exhibitor
Fabmatics GmbH
Test wafers are indispensable for semiconductor manufacturing, crucial for equipment qualification and process monitoring. They constitute up to 50% of a fab’s wafer inventory. Managing test wafer lots manually is time-consuming and prone to errors.
The Test Wafer Center (TWC) fully automates kitting and de-kitting of test wafer lots as well as their storage. Its compact and highly flexible layout allows up to 93 storage bins and up to 14 material handling locations making it the perfect solution for complex equipment qualifications scenarios. It gives you complete (remote) control for determining timing and content of each test wafer lot & enables just-in-time delivery to your process equipment.
Featuring SECS host communication, camera-based robot routing, optional wafer alignment & identification, and various carrier identification options, the TWC ensures safe, accurate, & fully traceable material control.
Connecting to any Automated Material Handling System (conveyor or vehicle based) as well as allowing manual carrier input or output, the integration with your fab is seamless & quick.
The optional prealigner including wafer ID reader enhances material tracking cabability.