SEMICON West 2025German Exhibitors Dürr Systems AG CTS

Dürr Systems AG CTS

www.durr.com/en/industry-solutions/electrics-electronics/semiconductor

About us

With 50+ years’ industry experience and more than 10,000 systems installed worldwide, Dürr is a long-recognized, world-class supplier of environmental solutions for virtually any application where air pollution control is required. We supply high-quality, complete solutions from design, engineering and manufacturing through installation, commissioning and servicing.

We combine our technical expertise with global availability to support our customers throughout the world, offering solutions for multiple pollutants—from a single-source. For our customers, this means single-point accountability and a seamless, integrated air pollution control project to achieve lowest emissions.

Sorpt.X CD/CC

Oxi.X

Oxi.X RK

Oxi.X RV (electrical)

SCR

Address

Dürr Systems AG CTS
Carl-Benz-Str. 34
74321 Bietigheim-Bissingen
Germany

E-mail: yannik.graf@durr.com
Phone:  +49 7142 781032
Internet: www.durr.com/en/industry-solutions/electrics-electronics/semiconductor
Dürr Systems, Inc.
26801 Northwestern Highway
48033 Southfield, MI
United States

E-mail: durrsystems@durrusa.com
Phone:  +1 24 84502000
Internet: www.durr.com/en/industry-solutions/electrics-electronics/semiconductor
Dürr Systems, Inc. - De Pere
830 Prosper Street
54115 De Pere, WI
United States

E-mail: sales.cts@durrusa.com
Phone:  +1 92 03365715
Internet: www.durr.com/en/industry-solutions/electrics-electronics/semiconductor

Contact person:

Yannik Graf
Sales Manager - Semiconductors (EMEA and ASIA)
E-mail: yannik.graf@durr.com
Phone: +49 173 7182093

Nina Zerman
Senior Sales Manager Dürr AMER
E-mail: nina.zerman@durr.com
Phone: +1 248 921-2804

Products & Services

Semiconductor Manufacturing & Processing
Cleanroom & Process Environment Technology
Sustainability & Energy Efficiency

We provide cutting-edge technology, specifically engineered for the needs of the semiconductor industry:

  • Thermal Oxidizer (Skid-mounted)

  • Concentrators (Skid-mounted)

  • Wet scrubbers (Vertical)

  • Solvent recovery

  • Worldwide service

Oxi.X – Thermal processes

Dürr has a comprehensive range of systems that use thermal processes for Air pollution control and is specially designed to meet customers' requirements. The thermal processes are based on the separation principle and use combustion to remove pollutants from exhaust air.

For the semiconductor industry:

  • Oxi.X RV (Electric)

  • Oxi.X RK (Gas)

  • Oxi.X TR (Direct Fired)

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Oxi.X Thermal processes

Sorpt.X CD/CC – VOC Concentration

The Sorpt.X CD/CC Air Pollution Control System is a tried-and-tested solution for continuously purifying large exhaust air volume flows containing low levels of solvents (VOCs) using adsorptive concentration with a downstream purification phase.

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Sorpt.X CD/CC – VOC Concentration

Sorpt.X SW – Wet Scrubbers for Acid Gas Absorption

Dürr provides a variety of Sorpt.X SW wet scrubbers including spray tower, tray tower and packed tower designs for industrial acid gas emissions control.

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Sorpt.X SW Wet scrubber

Selective Catalytic Reduction (SCR)

Air Pollution Control Systems (SCR) used for the selective catalytic reduction of nitrogen oxides (NOx) in flue gases and process exhaust gases when high nitrogen oxide conversion rates needed. As their name indicates, selective catalytic reduction systems based on the catalytic process.

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Solvent recovery (SCR)

Solvent recovery

Successful recovery of your solvents

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