SEMICON West 2025German Exhibitors SONOTEC GmbH

SONOTEC GmbH

www.sonotec.eu

About us

SONOTEC is specialized in ultrasonic sensor technology in the field of non-contact and non-invasive liquid flow measurement and air bubble detection in flexible tubes and hard plastic pipes.

As a global technology leader, we offer excellent product quality, first-class measurement performance, and outstanding service to our customers in medical technology, biotechnology, and the semiconductor industry. In order to guarantee highest product quality, we are certified according to ISO 9001 as well as EN ISO 13485 and fulfil the directives for the manufacturing of products to be applied in potentially explosive atmospheres according to ATEX/IECEx.

In addition to our off-the-shelf products, we offer customized sensor solutions responding to application-specific requirements.

The installation of SEMIFLOW flow sensors contributes to resource efficient and sustainable working in chemical supply systems in wafer manufacturing

Non-contact flow sensors of the SEMIFLOW series play a critical role in wafer cleaning during semiconductor manufacturing

Flow measurement with highly accurate non-contact SEMIFLOW flow meters is necessary in CMP for slurry management

Implementing non-contact flow meters of the SEMIFLOW series significantly improves fab process quality

Address

SONOTEC GmbH
Thüringer Str. 33
06112 Halle (Saale)
Germany

E-mail: sonotec@sonotec.de
Phone:  +49 345 133170
Internet: www.sonotec.eu
SONOTEC US Inc.
10 Newton Pl., Ste. 100
11788 Hauppauge, New York
United States

E-mail: sales@sonotecusa.com
Phone:  +1 631 4154758
Internet: www.sonotecusa.com/

Contact person:

Anika Baumhauer
International Strategy & Sales Manager
E-mail: anika.baumhauer@sonotec.de

James Smith
Sales Manager Americas
E-mail: jsmith@sonotecusa.com

Products & Services

Semiconductor Manufacturing & Processing

SONOTEC has succeeded in thriving individual ultrasonic sensor solutions specifically designed for the semiconductor industry. The product series of non-contact flow meters and bubble detectors are important quality management instruments to monitor and control liquid flow processes.

SEMIFLOW flow meters and SONOCHECK bubble detectors both measure directly through the tubing or plastic pipe with no contact to the abrasive, adhesive, corrosive, and high-purity liquids applied in the industry. The SEMIFLOW Ex 1 flow meter opens up a new product category for the use in hazardous environments.

Due to the innovative clamp-on technology, SONOTEC’s non-contact sensors eliminate any risk of leakages, product contaminations or system downtimes. With their compact housing including integrated electronics and analysis unit, the ultrasonic sensors are as small as a single transducer and can be easily implemented into existing architectures.

Ultrasonic Clamp-On Flow Meter SEMIFLOW CO.65

SEMIFLOW CO.65 clamp-on flow meters are specifically designed for the semiconductor industry. The highly precise and robust ultrasonic sensors measure directly through the rigid plastic tube or pipe without contact to the liquid, eliminating risks of leakages and contaminations, thus increasing uptime and maximizing yield. Their compact housing with integrated electronics board is perfectly suited for a convenient system implementation.

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Ultrasonic Clamp-On Flow Meter SEMIFLOW CO.65

Product Series of Ultrasonic Clamp-On Flow Meter SEMIFLOW CO.65

Ultrasonic Clamp-On Flow Sensor SEMIFLOW CO.66 Ex1

Specifically developed for the use in hazardous environments, the SEMIFLOW Ex1 Set opens a new product category for non-contact liquid flow measurement on rigid plastic tubing. It consists of the intrinsically safe SEMIFLOW CO.66 PI Ex1 flow sensor and the control gear Barrier Box ST Ex1.

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Ultrasonic Clamp-On Flow Sensor SEMIFLOW CO.66 Ex1

Ultrasonic Clamp-On Bubble Sensor SONOCHECK ABD06

The non-contact air bubble detectors SONOCHECK ABD06 can spot bubbles down to 1 μl and can also be used as full / empty detectors. In critical processes of wafer manufacturing the presence of air bubbles or empty lines can lead to extensive consequences. Thus, their timely detection is crucial to save resources and increase yield.

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Ultrasonic Clamp-On Bubble Sensor SONOCHECK ABD06

Product Series of Ultrasonic Clamp-On Bubble Sensor SONOCHECK ABD06

Ultrasonic Inline Flow Meter SONOFLOW IL.52

The highly accurate inline sensors SONOFLOW IL.52 perfectly meet the requirements to measure ultra-low flow rates in liquid filled tubes and pipes. Constructed as a built-in component for machines and apparatus, the sensors are resistant to high temperatures and are particularly suitable for demanding applications.

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Ultrasonic Inline Flow Meter SONOFLOW IL.52

Product Series of Ultrasonic Inline Flow Meter SONOFLOW IL.52

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